This is the value of standards and true interoperability – the factory is not restricted to using a proprietary operating system or buying a proprietary interface package provided by the equipment vendor. SEMI.org, an international organization of semiconductor manufacturer, is an organization body that govern the standards for semiconductor manufacturing equipment. Often the the standard referred to SECS/GEM standard, which includes the SECS-I, SECS-II, HSMS and GEM standards. However, there is a provision in the SECS standards for sharing a connection by specifying the device identification value in each message. The practice of connection sharing is not recommended for new deployments.
SECS communication can be eavesdropped and monitored by an independent application. For RS-232 connections this requires a cable tap which is easily made or purchased. Network connections can be monitored with the help of programs such as tcpdump which capture TCP/IP communication. Once a connection has been properly configured to a tool, messages can be sent between Ignition secs gem and the equipment. These messages are often complex, which is why SECS messages are often in the form of a JSON string, which can contain any number of lists and name/value pairs. The messages are typically sent and received using specialised scripting functions within Ignition, such assystem.secsgem.sendRequest andsystem.secsgem.getResponse, that the SECS/GEM module adds.
The NJ501 SECS/GEM CPU Unit is a NJ-series machine automation controller, and has built-in the SECS/GEM communications functions which are the standards in the semiconductor industry. It is the high-performance controller that fuses machine control and host communications. Built-in standard behavior for the state models of GEM with handling of more than 100 standard SECS message types, all required GEM variables, and event types. The third category of variable items are termed Equipment Constant Values. This term is a misnomer, since these values are not constant – these are values that the host is able to change within limits specified by the equipment. Equipment Constant Values are specified to be only single values and not lists of values or arrays of values.
The SEMI standards have shorthand names as well as their official identifiers, thus E4, E5, and E37 are also referred to as SECS-I, SECS-II, and HSMS respectively. (SEMI Equipment Communications Standard/Generic Equipment Model) Communications protocols between a host computer and semiconductor manufacturing equipment. SECS/GEM is used to control wafer steppers, lithographic equipment, etchers, ion implanters and other machines. SECS is a layer 6 protocol that describes the content of the messages while GEM is a layer 7 application protocol that defines the messages themselves. An alarm differs from an event in that it signifies an undesirable condition with both a set and clear state. For example, a process tool that relies on compressed air input might communicate an alarm condition if the input air pressure fell below the needed amount.
GEM defines how to use the core SECS-II messages to perform particular tasks, such as event report, data collection and recipe management. The equipment connections are what allow Ignition to communicate with the specialized semiconductor fab equipment. Equipment connections are setup within the Configure section of the Gateway Webpage. Connections can be made over Ethernet using TCP/IP or over a direct serial connection (SECS-I protocol) using a RS-232 cable. Note, that the direct serial connection requires that the equipment be connected directly to the Ignition Gateway server, and that the Serial Support Gateway Module be installed.
Other SEMI standards describe additional SECS-II message types for specialized purposes. The GEM standard E30 was created to provide guidance for the deployment of a subset of E5 with emphasis on a core set of message types and less variation in message and data item formats. The GEM standard also describes scenarios and state models to standardize the integration of SECS messaging with equipment actions, control, and behavior. Data Value Variables are similar to Status Variables in being read-only data items whose values can be communicated to the host. The distinction is that a Data Value Variable does not always have a valid value. For example, there is a Data Value Variable named AlarmID by the standards.
A highly automated factory that is utilizing the SECS/GEM interfaces to the extent that they want to continuously capture event and alarm information has also taken the steps to deploy host software that is rarely if ever down. We have actually had support calls where users have forgotten how to start their SECS software after months of uninterrupted running. Hand in hand with this level of automation is that the tools are not operated unless the host interface is functioning so that mistake-free process setup can be verified. Spooling has created problems with many host side users because its original specification did not provide for compatibility with older host software that is not aware of spooling. In a nutshell, the SECS interface may appear not to work correctly if the host does not send an initialization command to purge or unload the spool. Newer versions of the standards have introduced an Equipment Constant Value which allows the host to persistently disable spooling and avoid this problem.
Thus, they lack the coherence of something developed by a single team for a narrow set of requirements. Said another way, you can expect to see inconsistencies and imperfections when the world of SECS/GEM is considered in its entirety. A convention exists for the Function values used in message conversations. A message that Super profitability is initiated independently or asynchronously for sending has an odd Function value and is called a Primary message. A message that is sent as a reply to a received message is termed a Secondary message, and the Function value is an even number that is one more than the Function value received in the Primary message.
Communication between Ignition and the equipment is in the form of SECS messages defined by the SECS-II standard. SECS messages are typically sent and received using scripting functions within Ignition using the SECS/GEM defined messages (SECS Definition Language ) that are loaded into the equipment. SECS messages that contain data can also be written to Tags, updating the Tag’s values as new messages come in. This functionality is used to capture data coming back from equipment, such as tool traces within S6F1 messages. The default SDL file that is included with the SECS/GEM module is already configured to create Tags for S6F1 messages sent to the module from the tool. For other messages, the SECS/GEM module can be configured to update Tags by adding some additional parameters to the equipment’s SDL file.
Or click to send us a WhatsApp message and we will reply you shortly anywhere, anytime we are. A SECS message with an even numbered function that is a response to a request message. Each Equipment Connection has one SDL file and a default SDL file will be used if an alternate is not specified. The module will add a new header to the Configure section of the Gateway Webpage that allow you to configure connections to the equipment, or setup simulators that are used for testing. Collection events and alarms allow the host to monitor equipment operation. Semantic Scholar is a free, AI-powered research tool for scientific literature, based at the Allen Institute for AI.
The factory host can use this information to initiate processing requests, monitor results and adjust processing parameters as needed, or respond to abnormal scenarios, all using standard SECS messaging. The Transport Protocol Standards define how Day trading SECS/GEM messages are transferred between the host and equipment. Certain events are required by the GEM connectivity standards, but the equipment is expected to define additional events to allow the host to monitor equipment-specific activities.
In simple words, the SECS/GEM standard defines messages, state machines, and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30 but is frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines a common set of equipment behavior and communication capabilities to provide functionality as well as the flexibility to support manufacturing. Since the GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV. On the host side, a factory architecture for supervisory control and monitoring will usually define a «driver» level for equipment integration.
Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products, and change variables. SECS/GEM protocol has been standardized by the non-profit association SEMI . Spooling is the ability for the equipment to save an ordered sequence of messages that would have been communicated to the host during a period when host communication is interrupted. At first glance it seems like this is a valuable feature, however, that is not the case, at least for factories that we are familiar with.
The Hume host libraries provide a high-level start for drivers with their built-in features for handling event reports and assigning virtual names for events and variables. Also, the inclusion of the Hume DMH message queue system can be a key feature. You cannot shutdown and restart the entire factory to deploy a new or updated Famous traders driver, and if a driver is not on-line, the failure needs to be handled gracefully. For these reasons and others, a message queue interface is preferred for integrating drivers into a distributed factory system. SECS /GEM is communication interface protocols for communication between semiconductor equipment and a fab host.
When the host is controlling the equipment, it has the ability to send commands like «START», «STOP», «PAUSE», «RESUME,» and «ABORT» to control the equipment’s processing. As mention above, as an implementation reference, I would try to keep the source code is clean and easy to understanding. Product support is not my goal coz I’m not in this industry for a long time. We have collection of more than 1 Million open source products ranging from Enterprise product to small libraries in all platforms. The Leda solution complies with SEMI E4, E5, E30, E37 communication protocols.
Recent SEMI Standards activities added requirements for Y2K compliance, which meant semiconductor equipment suppliers and chip manufacturers alike needed a way to test communications interfaces. GW Associates responded with the Y2K.Pro test suite and included it in the SECSIM Pro product. The SDK is also come with a Model Builder Editor that let you quickly and easily model the equipment SECS/GEM capability that will be communicating with your host application. Rather than coding the formats, communication settings, other equipment modeling into your application, you use SecsToTool Model Builder to configure it and generate the data into a single xml file.
This capability is referred to as supporting concurrent open transactions. Older RS-232 software may have limits on the support of concurrent open transactions, in which case the sender may need to wait for a reply before sending another Primary message that requires a reply. The GEM standards outline a control state model for defining the level of cooperation between the host and equipment.
The driver level software encapsulates equipment variation so that a uniform command interface is provided to upper level software. Alarm and event report messages that originate from the equipment can be mapped or filtered before passing them on to general monitoring software. Data from event reports can be collected by the driver, combined with context information, and sent to a persistent database for later analysis and reporting.